TY  - BOOK
AU  - Varadan , Vijay K.
AU  - Vinoy , K . J
AU  - Gopalakrishnan , S.
TI  - Smart material systems and MEMS : design and development methodologies
SN  - 9788126531707
U1  - 621.381 
PY  - 2011///
CY  - New Delhi
PB  - Wiley
KW  -  Microelectromechanical systems ; Smart materials
ER  -