| 000 | 00354nam a22001577a 4500 | ||
|---|---|---|---|
| 003 | BML | ||
| 020 | _a978812653260 | ||
| 082 |
_a621.38152 _bMAY |
||
| 100 | _aMay , Gary S. | ||
| 245 | _aFundamentals of semiconductor fabrication | ||
| 250 | _a1st. | ||
| 260 |
_aNew Delhi _bWiley _c2012 |
||
| 300 | _a305p. | ||
| 700 | _aSze , Simon M. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c2015 _d2015 |
||