| 000 | 00352nam a22001457a 4500 | ||
|---|---|---|---|
| 003 | BML | ||
| 020 | _a9780198084808 | ||
| 082 |
_a621.38152 _bCAM |
||
| 100 | _aCampbell , Stephen A. | ||
| 245 | _aThe science and engineering of microelectronic fabrication | ||
| 250 | _a2nd ed. | ||
| 260 |
_aNew York _bOxford _c2012 |
||
| 300 | _a603p. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c2074 _d2074 |
||